Microsystem Design

This text aims to bring together, in an accessible form, the fundamentals of the wide-ranging disciplines needed by engineers working in the field of micro-elec... » 

This text aims to bring together, in an accessible form, the fundamentals of the wide-ranging disciplines needed by engineers working in the field of micro-electromechanical systems (MEMS). The book is organized around a set of case studies based on real products or published prototype work. «